[29a-G10-1~11] 17.3 Exploration of new functions and evaluation of basic properties

[29a-G10-4] Characterization of the Electrical Properties for Graphene Grown by Microwave Plasma-CVD

^○Yuki Okigawa^1,2, Kazuo Tsugawa², Takatoshi Yamada^1,2, Masatou Ishihara^1,2, Masataka Hasegawa^1,2 (AIST¹, TASC²)

Keywords:プラズマCVD、van der Pauw、グラフェン