[29a-G10-1~11] 17.3 Exploration of new functions and evaluation of basic properties

[29a-G10-5] Resist-free fabrication of graphene electric devices

^○Ryota Ifuku¹, Takafumi Moriyama¹, Kosuke Nagashio¹, Tomonori Nishimura¹, Akira Toriumi¹ (Univ. of Tokyo¹)

Keywords:グラフェン、レジスト、プロセス