[29a-G12-1~11] 17.4 Device application

[29a-G12-10] Process development for the fabrication of nanocarbons on 300mm Si wafer (2)

^○Daisuke Nishide¹, Takashi Matsumoto¹, Ban Ito¹, Yuichi Yamazaki¹, Munehito Kagaya¹, Makoto Wada¹, Tatsuro Saito¹, Masayuki Kitamura¹, Masahito Watanabe¹, Naoshi Sakuma¹, Akihiro Kajita¹, Tadashi Sakai¹ (LEAP¹)

Keywords:ナノカーボン