[29a-G12-1~11] 17.4 Device application

[29a-G12-3] △Estimation of the contact resistivity at CNT/SiC interface by conductive AFM

^○Megumi Shibuya¹, Masafumi Inaba¹, Kazuyoshi Oohara¹, takumi Ochiai¹, yoshiho Masuda², Atsushi Hiraiwa¹, Michiko Kusunoki², Hiroshi Kawarada¹ (Waseda Univ.¹, Nagoya Univ.²)

Keywords:カーボンナノチューブ、シリコンカーバイド、接触抵抗