[29a-G19-1~10] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[29a-G19-5] Effects of physical properties of low resistivity AZO thin films grown by RF sputtering under H₂ atmosphere

^○Masaki Tanaka^1,2, Kenji Yoshino^2,3 (Ube Material¹, Miyazaki Univ.², JST-CREST³)

Keywords:亜鉛、スパッタ