[29a-G19-1~10] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[29a-G19-6] Characterization of chemical states in near surface region of Ga-doped ZnO thin films

^○Hisao Makino¹, Huaping Song¹, Tetsuya Yamamoto¹, Masaaki Kobata¹, Keisuke Kobayashi¹ (Research Inst., Kochi Univ. of Tech.¹)

Keywords:透明導電膜、酸化亜鉛、光電子分光