The 60th JSAP Spring Meeting,2013

Presentation information

Regular sessions(Oral presentation)

15. Crystal Engineering » 15.4 III-V-group nitride crystals

[29a-G21-1~11] 15.4 III-V-group nitride crystals

Fri. Mar 29, 2013 9:00 AM - 12:00 PM G21 (B5 4F-2405)

[29a-G21-8] △Reaction Mechanism Analysis of GaN Etching Processes by Quantum Chemical Molecular Dynamics Method

○(M1)Kazuyuki Yanagiya1, Hiroshi Ito1, Takuya Kuwahara1, Takeshi Ishikawa1, Yuji Higuchi1, Nobuki Ozawa1, Momoji Kubo1 (Tohoku Univ.1)

Keywords:GaN、Etching