The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

15. Crystal Engineering » 15.4 III-V-group nitride crystals

[29a-G21-1~11] 15.4 III-V-group nitride crystals

Fri. Mar 29, 2013 9:00 AM - 12:00 PM G21 (B5 4F-2405)

[29a-G21-9] Removal of Particle from Sapphire Surface Using Functional Water

○Toru Masaoka1, Hiroshi Morita1 (Kurita Water Industries Ltd1)

Keywords:機能水、表面洗浄