[29a-G21-1~11] 15.4 III-V-group nitride crystals

[29a-G21-8] △Reaction Mechanism Analysis of GaN Etching Processes by Quantum Chemical Molecular Dynamics Method

^○（M1）Kazuyuki Yanagiya¹, Hiroshi Ito¹, Takuya Kuwahara¹, Takeshi Ishikawa¹, Yuji Higuchi¹, Nobuki Ozawa¹, Momoji Kubo¹ (Tohoku Univ.¹)

Keywords:GaN、Etching