[29a-G6-1~12] 13.1 Basic properties and their evaluation

[29a-G6-1] Laser-Assisted Atom Probe Analysis of SiN Thin Film with 15N Isotope

^○Teruyuki Kinno¹, Mitsuhiro Tomita¹, Katsuyuki Kitamoto², Shiro Takeno² (Toshiba R&D Center¹, Toshiba S&S Company²)

Keywords:アトムプローブ、レーザー、窒化膜