[29a-G6-1~12] 13.1 Basic properties and their evaluation

[29a-G6-12] △Tensor Evaluation of Stress Relaxation Profile in Strained SiGe Nanostructures on Si Substrate

^○（D）Motohiro Tomita^1,2, Daisuke Kosemura¹, Koji Usuda³, Atsushi Ogura¹ (Meiji Univ.¹, JSPS Research Fellow DC², AIST GNC³)

Keywords:Raman、EBSP、超解像