[29a-G7-1~11] 22.1Joint Session L "Basics and applications of MEMS, NEMS: Integration of diverse functionalities"

[29a-G7-11] Variable-gap Si Wire Waveguide Coupler Switch With Nano-latch Mechanism

^○shotaro Abe¹, Yoshiaki Kanamori¹, Kazuhiro Hane¹ (Tohoku Univ.¹)

Keywords:光スイッチ、シリコン細線導波路、MEMS