[29a-PA2-1~10] 3.4 Optical measurement

[29a-PA2-1] Development of technology and equipment basing on polarization conversion for roughness measurements of metal material surface

^○（PC）Xuefeng Li¹, Toshihiro Kamohara¹, Kazuhiro Nonaka¹ (National Institute of Advanced Industrial Science and Technology¹)

Keywords:表面粗さ、偏光変換、非接触型計測