[29a-PB1-1~5] 9.1 Dielectrics, ferroelectrics

[29a-PB1-5] Preparation and Evaluation of PZT thin films using STO buffer layers by MOD process

^○Keiko Kajimura¹, Shinithi Yamamoto¹ (Ryukoku.Univ¹)

Keywords:PZT、MOD法