[29p-A3-1~6] 16.2 Processing technologies and devices

[29p-A3-1] Low-Temperature Growth of Ge in a-Ge/Sn Stacked-Structures on Insulator

^○Akira Ooato¹, Tsuneharu Suzuki¹, Jonghyeok Park^1,2, Masanobu Miyao¹, Taizoh Sadoh¹ (Kyushu Univ.¹, JSPS Research Fellow²)

Keywords:Ge、触媒成長