[29p-A9-1~12] 9.1 Dielectrics, ferroelectrics

[29p-A9-3] △Point Defects in YAlO₃ (V) -Effect of Thermal Annealing-

^○（B）Shoji Kaneko¹, Daiki Yamasaka¹, Yosuke Horii¹, Takaaki Morimoto¹, Yoshimichi Ohki¹ (Waseda Univ.¹)

Keywords:High-k、ゲート絶縁膜、YAlO3