[29p-A9-1~12] 9.1 Dielectrics, ferroelectrics

[29p-A9-2] △Point Defects in YAlO₃ (Ⅳ)-Their Manifestation and Disappearance by Photon Irradiation-

^○（B）Takahiro Inoue¹, Takaaki Morimoto¹, Daiki Yamasaka¹, Yousuke Horii¹, Yoshimichi Ohki¹ (Waseda Univ.¹)

Keywords:High-k、ゲート絶縁膜、YAlO3