Immersion Effect using Fluoride Liquid in Thermal Nanoimprint on PMMA Film

Presentation information

Regular sessions(Oral presentation)

07. Beam Technology and Nanofabrication » 7.4 Nanoimprint

Fri. Mar 29, 2013 1:30 PM - 6:45 PM B1 (K2 3F-1301)

^○Harutaka Mekaru¹, Hiroshi Hiroshima¹ (AIST¹)

Keywords:ナノインプリント、毛細管架橋、液浸