[29p-B1-1~20] 7.4 Nanoimprint

[29p-B1-10] Study of the releasing modes with the release mechanism of the multi-axis control in nanoimprint

^○Tomoki Nishino^1,2, Honoka Fujita¹, Hiroaki Kawata^1,2, Yoshihiko Hirai^1,2 (Osaka Pref. Univ¹, JST-CREST²)

Keywords:離型