The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

07. Beam Technology and Nanofabrication » 7.4 Nanoimprint

[29p-B1-1~20] 7.4 Nanoimprint

Fri. Mar 29, 2013 1:30 PM - 6:45 PM B1 (K2 3F-1301)

[29p-B1-12] Investigation of Acrylate Thin Films Absorbing Pentafluoropropane using Quartz Crystal Microbalance

○Shu Kaneko1, Masaru Nakagawa1,2 (IMRAM, Tohoku Univ.1, JST-CREST2)

Keywords:光ナノインプリント、水晶発振子マイクロバランス法、ペンタフルオロプロパン