Fine Metal Pattern Fabrication by use of Thermal Nanoimprint Lithography and Electroless Ni Plating

Presentation information

Regular sessions(Oral presentation)

07. Beam Technology and Nanofabrication » 7.4 Nanoimprint

Fri. Mar 29, 2013 1:30 PM - 6:45 PM B1 (K2 3F-1301)

^○（M1）Takuya Kitagawa¹, Hiroaki Kawata¹, Yoshihiko Hirai¹ (Osaka Prefecture University¹)

Keywords:ナノインプリント