The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

07. Beam Technology and Nanofabrication » 7.4 Nanoimprint

[29p-B1-1~20] 7.4 Nanoimprint

Fri. Mar 29, 2013 1:30 PM - 6:45 PM B1 (K2 3F-1301)

[29p-B1-20] Fabrication of tunable laser using nanoimprint lithography

○Hiroyuki Yoshinaga1, Masaki Yanagisawa1, Toshimitsu Kaneko1, Kan Akiyama2, Mikio Tajima2, Daisei Shoji2, Takuya Fujii2, Hajime Shoji1 (Sumitomo Electric Industries, Ltd.1, Sumitomo Electric Device Innovations, Inc.2)

Keywords:ナノインプリント、波長可変レーザ