Formation of Inclined Sidewalls in Microchamber on Glass Chips

Presentation information

Regular sessions(Oral presentation)

07. Beam Technology and Nanofabrication » 7.4 Nanoimprint

Fri. Mar 29, 2013 1:30 PM - 6:45 PM B1 (K2 3F-1301)

^○Harutaka Mekaru¹, Chieko Okuyama¹, Akihisa Ueno² (AIST¹, Nano Craft Technologies²)

Keywords:非焦点紫外線露光、Si含有フォトレジスト、ガラス成形