[29p-B1-1~20] 7.4 Nanoimprint

[29p-B1-5] Hybrid Nanoimprinting using Shielded Mold onto Photoinduced Liquid Crystalline Polymer

^○Makoto Okada¹, Emi Nishioka², Mizuho Kondo², Tomoyuki Sasaki³, Yuichi Haruyama¹, Hiroshi Ono³, Nobuhiro Kawatsuki², Shinji Matsui¹ (Laboratory of Advanced Science and Technology for Industry (LASTI), Univ. of Hyogo¹, Department of Materials Science and Chemistry, Graduate School of Engineering, Univ. of Hyogo², Department of Electrical Engineering, Nagaoka Univ. of Technology³)

Keywords:ナノインプリント、光反応性高分子液晶