[29p-B1-1~20] 7.4 Nanoimprint

[29p-B1-6] Selective Patterning of Fluorinated Self-assembled Monolayer by UV nanoimprinting

^○Hitomi Wakaba^1,2, Makoto Okada^1,2, Syuso Iyoshi^1,2, Yuichi Haruyama^1,2, Shinji Matsui^1,2 (Univ.of Hyogo¹, JST-CREST²)

Keywords:UVナノインプリント、フッ素系単分子膜