[29p-B1-1~20] 7.4 Nanoimprint

[29p-B1-8] Nanopatterning using natural material to amorphous substance materials surface by nanoimprint lithography

^○Naoya Inoue¹, Geng Tan¹, Hideo Oi², Masahiro Mita², Norimichi Okuda³, Akifumi Matsuda¹, Mamoru Yoshimoto¹ (Tokyo Inst. of Tech.¹, Kyodo International Inc.², SCIVAX Corp.³)

Keywords:ナノインプリント、ナノインプリント、マイカ