The 60th JSAP Spring Meeting,2013

Presentation information

Print

Regular sessions(Oral presentation)

07. Beam Technology and Nanofabrication » 7.6 Ion beams

[29p-B2-1~18] 7.6 Ion beams

Fri. Mar 29, 2013 1:30 PM - 6:15 PM B2 (K2 3F-1302)

[29p-B2-1] Characteristics of electron beam ion source

○Makoto Sakurai1, Shogo Sakai1, Shunsuke Ohtani2, Hiroyuki Sakaue3 (Kobe Univ.1, Univ. Electrocomm.2, Nat. Inst. Fusion Sci.3)

Keywords:電子ビームイオン源、多価イオン