[29p-B2-1~18] 7.6 Ion beams

[29p-B2-16] △c-axis parallel polarization inverted AlN multilayer structure by ion beam assisted deposition

^○（D）Masashi Suzuki¹, Takahiko Yanigitani¹ (Nagoya Inst. of Tech.¹)

Keywords:c軸平行極性反転AlN多層膜、イオンビームアシスト成膜法