[29p-B2-1~18] 7.6 Ion beams

[29p-B2-4] Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS) Using an Ionic-liquid Primary Ion Beam Source

^○Yukio Fujiwara¹, Naoki Saito¹, Hidehiko Nonaka¹, Shingo Ichimura¹ (AIST¹)

Keywords:イオン液体、エレクトロスプレー、二次イオン質量分析