[29p-B2-1~18] 7.6 Ion beams

[29p-B2-8] Soft-sputtering of insulin film with noble gases and methane gas cluster ion beams

^○（M1）Masanori Kanai¹, Kousuke Moritani¹, issei Ihara¹, kosuke Goto¹, Norio Inui¹, Kozo Mochiji¹ (Univ. of Hyogo¹)

Keywords:ガスクラスターイオンビーム、TOF-SIMS