[29p-B8-1~10] Frontiers of process technology for Si-related thin films

[29p-B8-1] Bonded Hybrid Wafers and Their Applications

^○Yoshihiro Kubota¹, Yuji Tobisaka¹, Shoji Akiyama¹, Takeshi Suwa¹, Kazutoshi Nagata¹, Shigeru Konishi¹, Makoto Kawai¹ (Shin-Etsu Chemical Co.¹)

Keywords:シリコン