The 60th JSAP Spring Meeting,2013

Presentation information

Symposium(Oral presentation)

Symposium » ・Frontiers of process technology for Si-related thin films

[29p-B8-1~10] Frontiers of process technology for Si-related thin films

Fri. Mar 29, 2013 1:30 PM - 5:45 PM B8 (K2 4F-1406)

[29p-B8-2] Defect engineering in multicrystalline silicon during melt growth

Noritaka Usami1 (IMR, Tohoku Univ.1)

Keywords:欠陥制御、融液成長、多結晶