[29p-B8-1~10] Frontiers of process technology for Si-related thin films

[29p-B8-5] High Quality Silicon Thin-Film and High Performance Devices on Glass Substrate

^○Akito Hara¹, Kuninori Kitahara² (Tohoku Gakuin Univ.¹, Shimane Univ.²)

Keywords:薄膜トランジスタ、多結晶シリコン