[29p-D2-1~19] 4.7 Laser processing

[29p-D2-18] Mechanism of nanograting formation on GaN by femtosecond laser ablation

^○Godai Miyaji¹, Kenzo Miyazaki¹ (IAE, Kyoto Univ.¹)

Keywords:フェムト秒レーザー加工、ナノ構造、GaN