[29p-D2-1~19] 4.7 Laser processing

[29p-D2-4] △Application of High Repetition Rate KrF Excimer Laser to Post Annealing Process of P-implanted ZnO Nanorods

^○（M2）Tetsuya Shimogaki¹, Taihei Ofuji¹, Norihiro Tetsuyama¹, Kota Okazaki¹, Mitsuhiro Higashihata¹, Hiroshi Ikenoue¹, Daisuke Nakamura¹, Tanemasa Asano¹, Tatsuo Okada¹ (Information Science and Electrical Engineering, Kyushu Univ.¹)

Keywords:酸化亜鉛、レーザーアニール、高繰り返しレーザー