[29p-D3-1~20] 6.6 Probe microscopy

[29p-D3-12] Development of atom force microscopy using optical beam deflection method at low temperature

^○（M1）Nao Komamura¹, Yoshitaka Naitoh¹, Yan　Jun Li¹, Yasuhiro Sugawara¹ (Osaka Univ.¹)

Keywords:原子間力顕微鏡、光てこ変位検出方式