The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

06. Thin Films and Surfaces » 6.4 New thin-film materials

[29p-F1-1~17] 6.4 New thin-film materials

Fri. Mar 29, 2013 2:00 PM - 6:45 PM F1 (E3 1F-102)

[29p-F1-7] △Thin Film Deposition of c-BN by CVD Method

○Masanori Kobayashi1, Hidetoshi Miyashita2, Takahito Ono1 (Tohoku Univ.1, Tottori Univ.2)

Keywords:窒化ホウ素、c-BN、CVD