[29p-F2-1~19] 6.3 Oxide-based electronics

[29p-F2-16] Fabrication of VO₂ free-standing microstructures and their transport properties

^○Shota Yamasaki¹, Teruo Kanki¹, Luca Pellegrino², Nicola Manca^2,3, Antonio Siri^2,3, Daniele Marre^2,3, Hidekazu Tanaka¹ (Osaka Univ.¹, CNR-SPIN², Genova Univ.³)

Keywords:フリースタンディング、VO2、酸化物薄膜