[29p-F2-1~19] 6.3 Oxide-based electronics

[29p-F2-19] Growth of VO₂ thin film on Ti/Si(100) by using ICP-assisted sputtering and its vertical switching

^○Suruz Md.¹, Kunio Okimura¹ (Tokai unv.¹)

Keywords:二酸化バナジウム、積層方向スイッチング