[29p-F2-2] ITO Thin Films Fabricated by a Hybrid Facing-target Sputtering System
Keywords:ハイブリッド対向スパッタ、スパッタ、ITO
Presentation information
Regular sessions(Oral presentation)
06. Thin Films and Surfaces » 6.3 Oxide-based electronics
[29p-F2-1~19] 6.3 Oxide-based electronics
Fri. Mar 29, 2013 2:00 PM - 7:00 PM F2 (E3 3F-303)