[29p-G19-1~17] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[29p-G19-3] Evaluation of Crystallinity by Nano-Beam Electron Diffraction

^○Koji Dairiki¹, Masahiro Takahashi¹, Takuya Hirohashi¹, Masashi Tsubuku¹, Masashi Oota¹, Shunpei Yamazaki¹ (Semiconductor Energy Laboratry co. ltd¹)

Keywords:電子線回折、IGZO、アモルファス