The 60th JSAP Spring Meeting,2013

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Regular sessions(Oral presentation)

21. Joint Session K » 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

[29p-G19-1~17] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

Fri. Mar 29, 2013 2:00 PM - 6:30 PM G19 (B5 4F-2403)

[29p-G19-5] Effect of Hydrogen on Crystallization of IGZO

○Takuya Hirohashi1, Motoki Nakashima1, Masahiro Takahashi1, Masashi Tubuku1, Shunpei Yamazaki1 (Semiconductor Energy Laboratory Co.,LTD.1)

Keywords:IGZO、第一原理計算