[29p-G2-1~7] 11.5 Junction, circuit fabrication process and digital applications

[29p-G2-6] Fabrication process of NbN integrated circuit for superconducting qubit

^○Hirotaka Terai¹, Kazumasa Makise¹, Wei Qiu¹, Zhen Wang¹, Yasunobu Nakamura^2,3 (NICT¹, Tokyo Univ.², RIKEN³)

Keywords:超伝導量子ビット、NbN集積回路、作製プロセス