[29p-G21-1~21] 15.4 III-V-group nitride crystals

[29p-G21-13] △Ambient gas dependence on lateral p-type activation

^○（M1）Yuka Kuwano¹, Mitsuru Kaga¹, Takatoshi Morita¹, Koji Yamashita¹, Daichi Minamikawa¹, Tetsuya Takeuchi¹, Motoaki Iwaya¹, Satoshi Kamiyama¹, isamu Akasaki^1,2 (Fac. Sci. & Technol., Meijo Univ.¹, Akasaki Inst., Nagoya Univ.²)

Keywords:トンネル接合、活性化、p型GaN