The 60th JSAP Spring Meeting,2013

Presentation information

Regular sessions(Oral presentation)

14. Semiconductors B (Exploratory Materials, Physical Properties, Devices) » 14.1 Physical properties of exploratory materials

[29p-G7-1~19] 14.1 Physical properties of exploratory materials

Fri. Mar 29, 2013 1:00 PM - 6:00 PM G7 (B5 2F-2201)

[29p-G7-1] Evaluation of diffusion coefficients of impurities in MBE-grown BaSi2 epitaxial layers

Kotaro Nakamura1, Masakazu Baba1, Khan M. Ajmal1, Weijie Du1, Noritaka Usami2, Kosuke Hara2, Kaoru Toko1, Takashi Suemasu1,3 (Inst. of Appl. Phys., Univ. of Tsukuba1, IMR, Univ. of Tohoku2, CREST JST3)

Keywords:不純物拡散、バリウムシリサイド