[29p-G7-1~19] 14.1 Physical properties of exploratory materials

[29p-G7-1] Evaluation of diffusion coefficients of impurities in MBE-grown BaSi₂ epitaxial layers

^○Kotaro Nakamura¹, Masakazu Baba¹, Khan M. Ajmal¹, Weijie Du¹, Noritaka Usami², Kosuke Hara², Kaoru Toko¹, Takashi Suemasu^1,3 (Inst. of Appl. Phys., Univ. of Tsukuba¹, IMR, Univ. of Tohoku², CREST JST³)

Keywords:不純物拡散、バリウムシリサイド