[29p-G7-1~19] 14.1 Physical properties of exploratory materials

[29p-G7-13] △Microstructure analysis of β-FeSi₂ film by MOCVD method on Si with Ag layer

^○Shunichi Motomura¹, Kouhei Hayashi¹, Masaru Itakura¹, Kensuke Akiyama² (Kyushu University¹, Kanagawa Ind. Tech Center²)

Keywords:鉄シリサイド、電子顕微鏡