[29p-PA1-1~17] 8. Plasma Electronics

[29p-PA1-1] Production of line-shaped plasma for improvement of material target utilization (8.3)

^○Yasunori Ohtsu¹, Yuuki Matsumoto¹, Morito Akiyama², Tatsuo Tabaru² (Saga Univ.¹, AIST MSRC²)

Keywords:スパッタリング、ターゲット利用率、永久磁石