[29p-PA1-1~17] 8. Plasma Electronics

[29p-PA1-15] H2 Plasma Cleaning of a-Si film by using pulse power supply (8.4)

^○Kenji Hashimoto¹, Shinji Yasui¹, Toshiki Manabe², Kunihiko Koike² (Nagoya Inst. Tec.¹, Iwatani Corp.²)

Keywords:クリーニング