[29p-PA1-1~17] 8. Plasma Electronics

[29p-PA1-3] Deposition of Al doped ZnO Films by RF superimposed Magnetron Sputtering (8.3)

^○Yoshinobu Matsuda¹, Daichi Matsuoka¹, Takato Nakashima¹, Koji Yamamoto¹, Masanori Shinohara¹ (Nagasaki Univ.¹)

Keywords:スパッタリング、酸化亜鉛、透明導電膜